Micro 3d Printing System And Integration

In recent years,3D printing technology,as a forward-looking and strategic technology,has lots of important high-end applications,especially in the field of biology and medical care.3D printing technology provides new approach for the field of biological materials,artificial organs,and 3D scaffold.However,the commercially available 3D printing system can hardly meet the application requirements of the printing resolution in both transverse and longitudinal direction.In this paper,we proposed a new type of micro 3D printing system with “coat-flash-strip” process for resolution improvement.The main contribution and experimental results of this paper are as follows:Firstly,the optical system in a laser direct writing based photolithography system is adopted to improve the transverse resolution of a 3D printing system.Secondly,a home developed “coat-flash-strip” process enables a much higher longitudinal resolution.Different from the immersion based 3D printing system whose resolution is limited by the longitudinal focal depth of the laser spot,the resolution in the vertical direction is defined by the position accuracy of the mechanical parts.In this paper,a micro 3D printing system was designed,built and tested.In terms of technology,suitable substrate materials and roll film materials were selected,and the separation mode between printing structure and film substrate was explored to ensure the stability of the system.In terms of system performance,parameters such as exposure intensity,mechanical flatness and printing resolution were tested and analyzed.In theory,the transverse printing resolution of the micro 3D printing system depends on the pixel size of the spatial light modulator,while the longitudinal resolution is determined by the mechanical positioning accuracy of the lifting platform(5?m).In the experiment,the transverse printing resolution was 13?m and the longitudinal printing resolution was 15?m.To prove the feasibility of the proposed micro 3D printing system,a grating structure with high aspect ratio(line width:32?m,depth:80?m)was successfully fabricated.Although the experimental results are still preliminary,the “coat-flash-strip” based 3D printing technology may meet the requirements of precision and area of complex 3D scaffold and lab on a chip devices in biological field.