Research Of Rotation Maskless Lithography System And Application

Roller imprinting technology has been regarded as a new generation of impringting technology for its high resolution,low cost and continuous large-scale imprinting,which has been widely used in many fields in recent years.In this paper,the key technology of the fabrication of the roller mold which used in the ultraviolet cured roller imprinting process will be studied.The key technology in the manufacture of roller mold is to form the nano/micro-structures on the roller.The traditional machining methods have the disadvantages for its high cost,long-time processing and sophisticated process,which have greatly restricted the development of roller imprinting technology.In this paper,a DMD-based(Digital Micromirror Device)maskless photolithography system has been designed,which is used for the rapid fabrication of the nano/micro-structures on the roller.The straightness accuracy of the system is controlled as 3?m,and the rotation runout accuracy is controlled within 15?m,which meets the requirements of the system.Based on the system,some experimental verification have been carried out and and some special morphology microstructures were formed on the roller.The results show that the system is feasible and easy to use.Some experiments have been performed,including the fabrication of some microstructural arrays and equal section spiral micro-lines based on the static mask and the linkage of the platform.On this basis,the variable section spiral micro-lines have been processed based on the dynamic mask and the linkage of the platform.In order to study the mechanism of thermal reflow process of the photoresist on the roller.Based on the combination of the Solidification&Melting model and the Volume of Fluid(VOF)two-phase flow model,the numerical simulation model is established to simulate the reflow process on the roller.Meanwhile,four stages of the reflow process are defined.Finally,the good consistency between the experiment and simulation shows that the reflow process on the roller is feasible under certain scale.