An Intelligent Cleanroom Management System For Micro-fabrication And Testing Lab

Microfabrication and characteristics facilities have become a necessary platform of research universities.Particle free laboratory environment with temperature and humidity stability are generally need to carry out micro fabrication and chip testing.However,operation,maintenance and management of a large public microfabrication facility consume a lot of energy and manpower,except for the initial construction cost.Following the international standards,the clean room laboratory needs 7×24 non-stop opening,which requires the facility must configure intelligent automatic management system in order to serve the users with high efficiency.In addition,the ventilation,air exhausting and air-condition system should be adjusted intelligently according to the activity of users to achieve the purpose of energy saving.Unfortunately,most of clean room laboratories nowadays still stay in a traditional"write-down" management system,and keep the sustaining power of the laboratory unchangeable in different user's activity.Thus,it is in demand to develop a intelligent system to achieve high efficiency and energy saving.The thesis designs a intelligent laboratory management system available on the web.Users can make a reservation in the webpage and next log in the reserved equipments using their campus IC card.A record is automatically generated after the user log out the equipment including process time and cost.The system keeps all-day long running and effectively improve the utilization of laboratory resources.A energy saving sustaining power system of the clean room is developed and its technique details were discussed in the thesis,too.Feedback controlled air valves,water valves and draught fans were embedded in the sustaining power system,and their operating power can be adjusted according to the user's activities by means of frequency conversion method to realize energy saving operation,while ensuring the stability of temperature,humidity and particle contamination in the clean room.The proposed clean room laboratory management system mainly consists of the following parts:i.User's reservation system of instruments and equipments;ii.Real-time supervision on the status of instruments and equipments and auto-billing system;iii.Energy saving sustaining power system;The above systems is available on the home page of the lab website,which is convenient for users to access and use.The energy saving system of the laboratory is controlled by a computer software with friendly and simple interface.The system has been put into use for nine months,and the laboratory achieved unattended,7 x 24 hours running successfully.The-30%monthly saving of electricity is achieved,and an annual savings is estimated up to 200-300K RMB.The first chapter of this thesis summarizes the development and current situation of the laboratory management system as well as the innovation of this work.The second chapter introduces the framework of the proposed laboratory management system and its key technologies,the energy saving laboratory sustaining power system which can automatically adjust the exhaust air rate and air volume according to the actual operation of the laboratory,under the premise of ensuring the stability of temperature,humidity and particles contamination in clean room.In the third chapter,the method to realize user's reservation,automatic equipments supervision and auto-billing system is discussed.In the fourth chapter,the energy-saving management system is developed according to the latest energy saving technology,and the actual application results of the energy-saving system is given.