Research On The Process Of 8X8 MEMS Rotating-Rirror Optical Switch

With the development of all optical network(AON),backbone network have higher requirements for data.In order to achieve high reliability of data transmission and the optimal network structure with optical cross connection of the optical switch is becoming more and more important.Based on MEMS NxN optical switch with a huge port number and all-optical switching structure gradually becomes a core technology for all optical network building,can applay in the OXC and OADM which is the network node of alloptical network.In this paper,We make research on the method of realizing NxN optical switch at home and abroad,and introduce optical switch which based on MEMS technology for emphatically,put forward a 8x8 MEMS optical switch scheme,for the dedication of the two-dimensional fiber arrays and array collimator assembly production process in-depth research,design and testing system of two-dimensional fiber arrays and collimator array index are tested.In this paper,we put forward a 8 x 8 MEMS micromirror array optical switch overall optical path design,through the relationship between the rotation angle of MEMS mirror and fiber port,by the spacing of fibers in the two-dimensional fiber arrays to determine the MEMS mirror angle,so as to push the optical path of the system is derived.According to the principle of making the collimator,waist,and the focal length of the lens,to design of the whole light path.In this paper,makeing research on the method for the realization of 2D fiber array,We proposes a new method to realize the two-dimensional fiber arrays through aperture in the silicon chips,and fabraction process is described in detail.The different kind of polish materials and conditions experimental study of polishing and is carried out,and one is to be proved feasible.Through the two-dimensional fiber arrays of preparing fiber collimator array,study of fiber collimator array working principle and method of manufacture,gives the specific production process.This paper through the design of the test platform,test the two-dimensional fiber arrays and collimator array characteristics.The insertion loss,return loss and the end surface dip angle of the two dimensional optical fiber array are tested,and the test results are analyzed.Also on the 2D collimator array insertion loss,waist distance and spot size of test and result analysis.In this paper,the design of the MEMS switch,the process scheme is studied,and the test is put forward to improve the scheme.It has a very good guide for the actual MEMS.