Drive And Control Of Large Range Nanopositioning Stage Based On Voice Coil Motor

With the development of the semi-conductor industry,biological detection,and optical engineering,the requirements for the micro-/nanopositioning stages are increasing.Nowadays,the research is mainly focused on the nanopositioning stage with large stroke,which is essential for promoting the performance of the equipment.Previously,the large stroke motion platform is mainly realized by rotary motor and precision linear guide.However,there is nonlinear effect induced by the friction force which will greatly reduce the performance of the stage.Therefore,in this paper,a nanopositioning stage of single degree of freedom is designed to realize a long travel range.The advantages of simple structure,high precision,and nonfriction make it suitable for many situations.First,differential quadrature method is proposed to model and analyze the motor magnetic field.The magnetic induction intensity of the magnetic field is calculated.The finite element analysis software Ansoft is used to analysis the same example.The results of both methods are equal,which verify the validity of the differential quadrature method.Second,different types of voice coil motors are analyzed,and the configuration of the inner magnetic axial charging voice coil motor is selected for voice coil motor.The 3D model of the voice coil motor is treated as a 2D model and the dimension of the voice coil motor is optimized using the differential quadrature method.The driver of the voice coil motor is designed to amplify the driver signal and to realize the high power output to the voice coil motor.A flexible hinge of the parallel mechanism is designed to achieve large stroke.The control system of the large stroke nanopositioning stage is designed.The NI c RIO-9076 and C series boards are adopted as the controller,and Renishaw grating is adopted for the displacement measurement.The software is designed to realize the trajectory generation,open loop debugging,closed loop PID and data logging.Based on the previous work,the experiment system of the large-scale nanopositioning system is established.The open-loop and closed-loop experiments are carried out to verify the performance of the platform.The experiment results shows that the stage can realize the large stroke of ±7mm with nanometer resolution.