Fabrication And Characterization Of Thermal Resistance Temperature Sensor On Situ Surface Of Turbine Blade

With the rapid development of intelligent Aero-engine,whether some in-situ high-temperature sensor can be designed and fabricated has become a key technology need.Turbine blade is the core of the main Aero-engine components,it has a long time in high stress,high temperature?up to1600??,high pressure air harsh environment.So it is necessary to design and fabricate a series of in-situ sensors on turbine blade,this sensors can be capable of instantaneously and accurately recording various physical field signals such as temperature,stress,flow rate,resistivity and thermal conductivity.In this paper,a series of MEMS technology is used to design and fabricate a thermal resistance temperature sensor on the in-suit surface of turbine blades.And the following results are obtained:?1?This paper introduces and explores the specific methods of fabrication of Pt thermal resistance temperature sensor on the in-situ surface of turbine blade.In this paper,two kinds of MEMS lithography methods?the PDMS soft lithography process and the contact exposure process on the surface of turbine blade?are proposed.In the PDMS soft lithography method,we firstly introduced how to prepare a PDMS soft template that was easy to contact with the substrate,then we introduced the process that makes the pattern on the PDMS soft template to be transferred to the in-suit surface of turbine blade effectively.?2?This paper introduces the method of measuring the resistance of the Thermal resistance temperature sensor on the surface of the turbine blade under the high temperature environment.We discussed the possible errors of this thermal test method are analyzed and corrected to the greatest extent.This paper presents a special three-wire measurement method,which can simultaneously measure the insulation resistance of ceramic insulator film on the surface of the turbine blade and the resistance value of the thermal resistance temperature sensor.Through this measurement,the electrical insulation properties of different ceramic film are explored.Ceramic coatings doped with a certain proportion of Al₂O₃ have better electrical insulation properties under high temperature?>600??,which can more effectively isolate the ceramic coatings and metal sensor layers of turbine blades.In addition,the ceramic insulation films under high temperature are further analyzed in this paper.The reasonable fitting formula is put forward to correct the thermal resistance of the temperature sensor.?3?In this paper,we measured the resistance of the temperature sensors on the surface of the turbine blade with the temperature ranging from 20?-1000?,and the stability of the temperature sensors fabricated by different lithography methods were compared under high temperature.The results show shat very good linearity and resistivity of the resistance-temperature was found,and the thermal resistance temperature sensor fabricated by contact exposure method has more stable high temperature measurement performance.Combining the above results,it can be seen that the thermal resistance temperature sensor fabricated in this paper not only has a good morphology structure,more importantly,has been able to keep stable temperature measurement performance in the experimental high temperature environment?up to 1000??,the successful in situ integrated manufacturing of this sensor on the turbine blade surface is sufficient to demonstrate the real feasibility and enormous potential of MEMS sensor applications on Aero-engine.