Research On Temperature Error Compensation Technology Of MEMS Inertial Sensor In Varying Dynamic Conditions

With the continuous development of MEMS inertial sensors,its application in navigation systems is becoming more and more common,and its accuracy is more and more concerned.For MEMS inertial sensors,its process determines that most of its errors are caused by temperature.Existing temperature compensation methods are mainly carried out under static conditions,without taking into account the temperature error under motion conditions,especially under variable dynamic conditions.In actual navigation,MEMS inertial sensors are generally not always in static conditions.Therefore,it is necessary to study the temperature error and its compensation method under dynamic or variable dynamic conditions.This paper analyzes and experimentally studies the temperature error of MEMS inertial sensor under dynamic conditions.First,the comparison between experiments and simulations shows that the error of the MEMS inertial sensor compensated by the function fitting method and the constant temperature control method under variable motion conditions is much larger than the standard error of the chip.And through the comparison of multiple variable motion states,it shows that the errors generated by different motion states are not the same,and it is difficult to compensate with a single function.Secondly,according to the above experimental phenomena,the mechanism of temperature error under variable motion is analyzed,and a temperature modulation method is proposed and the feasibility of the method is verified in principle.According to the formula derivation and simulation verification,the influence of the sampling frequency,temperature fluctuation frequency,temperature fluctuation amplitude,average temperature value and other parameters on the modulation result is determined.Then,the temperature field of the MEMS inertial sensor and its peripheral circuit are simulated.Aiming at the problem that high-power devices will interfere with the temperature field of the sensor,a PCB design with independent temperature control area is proposed.Finally,temperature field simulation is carried out on the temperature-controlled area.Simulation analysis of temperature modulation by adjusting the heating time verifies the feasibility of temperature modulation in this temperature-controlled area.Finally,the system prototype is designed and implemented to verify the compensation effect of the temperature modulation compensation method.Comparing the compensation effect with the compensation effect of the function fitting method and the constant temperature control method,the attitude angle drift is reduced by at least 12.26%,and the amplitude change is reduced by at least 3%.The effectiveness of the temperature modulation method is demonstrated in the experimental environment.