Manufacturing Process Study Of Valve-less Micropump Based On Soft Lithography

With the development of MEMS technology, microfluidic system has emerged as acritical research area and valveless micropump, as a core component of the microfluidicsystem, is also gaining more and more attention. However, the traditional manufacturingprocess of valveless micropump has the disadvantages of complex process, longproduction cycle, high cost. In order to solve these shortages, we propose a new designideas for valveless micropump manufacturing process and make some in-depth studies andappropriate improvements.Firstly, this paper introduces the valveless micropump working principle, and therelationship between diffuser/nozzle’ flow, efficiency and its main parameters (includingthe expansion angle, length, minimum width and depth of the pump chamber) is analyzedby finite element software. Based on this simulation results, valveless micropump isdesigned using the optimum parameters. Secondly, based on the “pump film and pumpintegrated” design idea, the mold of valveless micropump is designed, and then the moldis manufactured though MEMS processing technology (lithography, ICP etching), thespecific processes and parameters are discussed in detail. The dimensions of the molds(two-dimensional and three-dimensional) are measured by Keyence microscope to ensurethat they meet our design requirements. Finally, valveless micropump body ismanufactured making good use of the casing mold based on soft lithography technology.And diffuser/nozzle is detected by SEM. The effect of bonding quality parameters such asRF power, time of activation and oxygen flow is investigated. Bonding area and strength,two main indicators of bonding quality, are detected using manual peel and mechanicalshear tests respectively to optimize the bonding parameters. Valveless micropump ismanufactured successfully using the optimum parameters, and the performance of themicropump is tested.