Development Of Rolling Bearing Condition Monitoring System Based On Integrated Surface Acoustic Wave Sensor

Rolling bearings are one of the important components of mechanical structures,and their state directly affects the operation of the entire mechanical system.Accurate and reliable assessment of the damage state and life of the bearing is of great significance to the safe operation of the equipment.However,the current sensor for bearing condition monitoring is mainly a discrete structure,which is to contact the completed sensor with the bearing or the frame.This monitoring method is not only limited by the structure of the device,but also can only be obtained indirectly.Information reduces the accuracy of sensing.Therefore,in view of the shortcomings of existing bearing fatigue monitoring methods,considering the bearing operating conditions and spatial structure,the related research on sensor and bearing integration technology is carried out,and an integrated surface acoustic wave(Surface Acoustic)is proposed.Wave,SAW)The rolling bearing condition monitoring system of the sensor directly integrates the surface acoustic wave device into the bearing end face,and realizes the wireless transmission of the SAW sensor signal through the antenna,which provides a new idea for the integration and intelligentization of the bearing condition monitoring.Important research significance.Firstly,according to the working conditions,the structure of SAW sensor is designed.According to the existing processing conditions,the performance index of SAW sensor is considered comprehensively,and the membrane structure and specific size parameters of SAW sensor are determined.COMSOL Multiphysics 5.3 is used.The resonant frequency of the SAW sensor was designed to simulate the center frequency of the SAW sensor in Rayleigh wave mode.The scheme design,system implementation and program design of the SAW reader were carried out.Then,the preparation process of the piezoelectric layer and the electrode layer was determined.The effects of sputtering power,atmosphere ratio,atmospheric pressure and substrate temperature on the structure of the prepared film were studied.The process parameters required for the final preparation were optimized and selected according to the process.The parameters were successfully prepared,and the crystal structure,surface morphology and piezoelectric properties of the piezoelectric layer and the electrode layer were characterized.The processing technology of the interdigital electrode and the reflective grid was determined and the quality was successfully obtained.Good surface grid structure;the obtained SAW sensor was segmented,a single SAW sensor was obtained,and the resonant frequency of the SAW sensor was tested,which is basically consistent with the simulation results.Finally,the integrated design of the SAW device body and the bearing ring is designed,including the design and manufacture of the signal transceiver antenna,the design of the flexible circuit board for the wire connection and protection of the surface of the SAW device,and the transfer of the flexible circuit board and the antenna.The PCB board is fabricated,and the above components are integrated by using high-temperature structural glue and conductive silver glue;the temperature response characteristics and strain response characteristics of the prepared sensor are obtained through temperature calibration test and strain response test,and SAW is passed through static test.The position setting of the sensor provides guidance and the feasibility of the SAW sensor condition monitoring system developed in this paper is verified by dynamic response test.