| The fuselage-guide rail seat combination is a bearing component of the glass substrate optical detecting instrument,and provides an installation basis for the air detecting support system,the optical detecting system and the motion control system of the optical detecting instrument,and is the key to ensure the running precision of the instrument.In this paper,according to the relevant performance index requirements issued by the national major instrument development special "large glass substrate optical testing instrument" task book,the structural design and optimization of the fuselage-guide rail seat combination are carried out.The main research work includes:(1)A fuselage-guide rail seat combination with double-layer vibration isolation support is designed..The composite guide rail seat and the base are supported by air spring vibration isolation.The guide rail is made of ultra-precision stainless steel lubrication-free rolling guide.The guide rail movement is driven by linear motor.The composite guide rail seat is designed with high quality carbon structural steel and stainless steel.(2)According to the theory of engineering mechanics,the bending deformation equation of the composite guide rail seat with screw joint under simple supported constraint is derived.The bending deformation of the composite guide rail seat is ?0.01 mm,the vibration isolation frequency is ?2.4Hz and the assembly of each part is satisfied.As a target,the design model of the composite guide rail seat was determined,and the cross-section dimensions of the composite guide rail seat were designed and calculated.The static mechanical simulation was carried out by the finite element software Workbench,and the structural optimization design of the composite guide rail seat was carried out.The base structure of the double-layer vibration isolation supporting fuselage is designed..(3)The main components of the fuselage-guide rail seat combination of the glass substrate optical inspection instrument engineering prototype were designed,including the selection and calculation of important components such as rolling guides,linear motors and air springs.Through the test of the fuselage-guide rail seat combination of the glass substrate optical inspection instrument engineering prototype,the straightness of the guide rail is ?0.01mm/m,the vibration isolation frequency of the fuselage is ?2.4Hz,the fuselage-guide rail seat combination and the air bearing support The system,optical inspection system,and motion control system work well together. |
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