Study On Motion Characteristics Of A Two-Dimensional Parallel Piezoelectric Impact Drive Platform

Micro/nano precision displacement platforms are widely used in manipulation,transportation,measurement for micro-objects in biomedical,material chemistry,physical and electronic fields.These applications generally require cooperative motions of multiple degrees of freedom(multi-DOF)with a resolution of several nanometers and a range of several millimeters.Piezoelectric impact driving is a typical driving manner to realize the micro/nano manipulation,which has advantages of compact structure,fast response,flexible control,and electromagnetic immunity and shows competitive advantages and good prospects in the field of cross-scale precision positioning.Multi-DOF motions can be achieved by series and parallel constructions of several piezoelectric impact drive mechanisms to realize complex motions of end effectors.Compared with series construction,parallel construction would have a more compact structural design,which is more suitable for positioning and manipulating requirements of narrow space,such as STM,AFM,and other microscopic systems.In this dissertation,a two-dimensional parallel piezoelectric impact drive platform is proposed.Structural design and simulation,dynamic modeling and simulation,prototype manufacture and experimental testing are implemented to analyze two-dimensional parallel piezoelectric linear drive and motion characteristics.The main work and innovations include:(1)Mechanical structure and driving circuit of two-dimensional parallel piezoelectric impact drive platform are designed.The finite element structural simulation model is established and the static and modal simulations and anlyses are carried out to optimize the stator structural parameters.(2)Dynamic model and vector friction model of the two-dimensional parallel piezoelectric impact drive platform is established.The simulation model is established by using the numerical analysis software MATLAB/Simulink and the dynamic model parameters are determined.The motion characteristics of one-dimensional and two-dimensional impact driving are analyzed.(3)Prototype of two-dimensional piezoelectric impact drive platform is fabricated and the experiment equipment is set up.The driving characteristics of the stator and the motion and load characteristics of the platform are tested.The experimental results show that the platform has excellent one-dimensional and two-dimensional impactdriving performance.Research on the two-dimensional parallel piezoelectric impact drive platform proposed in this paper will expand theoretical system of impact driving mechanism and provide rich technical references for engineering applications of the parallel piezoelectric impact drive mechanisms.