Small Precision Motion Platform Based On Stick-slip Driving Principle

As one of the key technologies of nano-operating system,micro-nano driving technology has been widely used in many fields such as microsystem,medical science and integrated circuit manufacturing.However,in a microscopic apparatus such as a scanning probe microscope,not only high precision positioning and operation are required in a limited operation space,but also a larger operation range is required.This is a case where the driving method and structure of the micro / nano drive technology Types pose new challenges.In this research background,this paper presents a new type of small precision positioning platform based on stick-slip drive,and studies the key technologies.In the stick-slip driving realization mechanism research,analys the motion process of stick-slip driving,set up the kinematics model of stick-slip driving,understanding the motion relationship between the active part and the salve part.Through the analysis the movement rules of stick-slip driving in five frequency phases,deduced motion equation of stick-slip driving in the whole frequency range.The influence of all kinds of sports parameters on stick-slip driving and the best driving mode was got.In the stick-slip drive platform dynamics modeling and analysis,the dynamical model of the platform is obtained through the electrical model of the parallel piezoelectric stack,the mechanical dynamic model of drive system and the LuGre friction model.Then,the platform model is simulated by using Matlab / Simulink software and the influence of pre-pressure,mobile station mass and other factors on the stick-slip drive is analyzed.In the designing of the platform structure.The platform uses a piezoelectric stack as a driving element.The three functional flexible hinges,inertial mass and elastic force transmission components form a stator base as the transmission mechanism.The platform is modeled by ANSYS / Workbench software and the strength check Other finite element simulation.Combined with the theoretical analysis of the stick-slip drive system,the platform structure design is finally completed.In the prototype experiment of the platform,the open-loop experimental platform is used to test the performance parameters of displacement and velocity,respectively.The influence of parameters such as pre-pressure and mobile station on the platform step length was compared with the simulation results to verify the correctness of the model.Finally,the position feedback device is used to realize the closedloop control of the platform.By adjusting the parameters such as voltage and pulse period,the platform positioning accuracy can be improved.