Probe Operation Of Nanoparticles And Nanoclusters

With the rapid development of nanotechnology,the manufacturing precision of electronic components has continuously exceeded the limit.The traditional structure has not been able to meet the ultra-precision size requirements.The use of carbon nanotubes instead of traditional wires has become a new solution.Nano-clustered particles act as solders to play an important role in the stable connection of carbon nanotubes,which puts higher demands on nano-operation technology.However,at present,the theoretical analysis of the operation of nanoparticles is not clear.The research on the operation of nano-clusters is not deep.Therefore,the operation process of nanoparticles is studied,and the mechanical model of nano-particle operation is established.On this basis,the experiment of constructing carbon nanotube-nano cluster particle structure in three dimensions was completed,and the smallest unit of carbon nanotube wire was constructed,which laid a foundation for carbon nanotube interconnect technology.Firstly,the interaction between the nanoparticles and the substrate is studied,the adhesion phase,the attraction phase and the separation phase of the nanoparticles during the operation were analyzed respectively.The mechanical model of the probe picking,placing and pushing the nanoparticle operation was established.The model simulation analyzes the variation law of the force with the distance,and further obtains the judgment basis for the stable picking of the nanoparticles.Secondly,the adhesion phase of nano-operation is studied in detail.The nanoparticle-base model is taken as an example to analyze the distribution of nano-contact force.The simulation results are compared with the analytical values to verify the accuracy of the simulation model.Further exploration is made.The influence factors of the adhesion phase with the radius of the nanoparticle and the substrate material were obtained.The dynamic process under different operating conditions was simulated,including probe-driven nanoparticle operation,probe pick-up nanoparticle operation and probe pick-up.The dynamic process of nano-cluster particle manipulation explored the state change and force change of nanoparticles during operation,which provided a theoretical basis for subsequent experiments.Finally,nanoparticle operation experiments,including pre-preparation,method planning and experimental operation were completed based on SEM platform.The optimal experimental parameters of dispersed nanoparticles were obtained by dispersion experiments.The particles in nano-clusters were verified by the experiments of nanoclustered particles.The stability of the inter-bonding was verified by the experiment of relocating the nano-clustered particles across the substrate.The minimum unit of the carbon nanotube wire was obtained by three-dimensional modeling of the carbon nanotube-silver nanoclusters.The feasibility of constructing carbon nanotube wires in three dimensions.