Study On Preparation Technology Of High Purity Aluminum Target Of High Preferred Orientation And Fine Grain

High purity aluminum target is widely used in semiconductor device manufacturing industry.Besides the purity requirement of high purity aluminum,the target material also requires fine uniform grain structure and a high proportion of(001)orientation.The refinement and texture evolution of high purity aluminum have been studied under different rolling and annealing processes.The effect of dynamic recrystallization on Microstructure and texture of high purity aluminum target has been investigated.The effect of rolling and annealing process on Microstructure and texture of high purity aluminum has been studied.The results show that: the large pass processing is easier to produce homogeneous organization than the small amount of processing;Annealing temperature and annealing time have great influence on the microstructure of high purity aluminum,and the best annealing process is 3 hours at 240 degrees.With the increase of cold rolling shape variables,the proportion of(001)surface texture increased,the proportion of(112)、(123)and(124)decreased.The rolling process combined with hot rolling + intermediate heat treatment and cold rolling can effectively obtain fine grain size,in which the hot rolling temperature is 300℃,the intermediate heat treatment is 300℃ for 1 hour,the cold rolling passes is cooled by ice water,and the amount of processing is 50%,the finished product is annealed at 240℃ for 3 hours,the high purity aluminum target can be obtained,its average grain size is 164 μm,the proportion of(001)oriented grain is 31%.The effect of dynamic recrystallization on Microstructure and texture of high purity aluminum target has been investigated.The results show that there are more(001)texture in the texture of dynamic recrystallization.The main deformed structures are(112)、(123)and(124)texture.During annealing,new(001)oriented grains will be generated in the deformed microstructure area,while the orientation of the original grains in the crystalline structure remains basically unchanged.If there are deformed structures around the(001)oriented grains,it will grow up through the annexation,while the other oriented recrystallized grains will not change in size after annealing.Under the rolling condition of the low temper,most of the grains in the dynamic recrystallization structure of high purity aluminum are(001)oriented and the preferred orientation is obvious.As the rolling temperature increases,the composition of the dynamic texture will become diversified.