Research On The Ablation Of Copper Surface By 46.9nm Laser With A Toroidal Mirror

Compared with other wavelength lasers,soft X-ray lasers have the characteristics of high single-photon energy,short wavelength,and high pulse instantaneous power.Many countries have conducted a lot of exploration in the application of soft X-ray lasers.Among them,the interaction between soft X-ray lasers and substances is a hot spot in research and the foundation of many application directions.In terms of materials,there are few reports on the interaction with metal materials.In terms of focusing methods,most of the focusing lenses used in ablation experiments in various countries are multi-layer spherical mirrors.The optical distortion of the focusing spot is small,but the angle close to the normal incidence consumes most of the laser energy.Based on the above research status,this thesis used an toroidal mirror to conduct an experimental study on the interaction of the capillary discharge laser at 46.9nm with copper.In theory,the focal length of the toroidal mirror was preliminarily calculated according to the focal length formula,and then the focusing optical path of the toroidal mirror was simulated.The simulated unfocused spot shape was set according to the actually measured unfocused spot shape.The position of the focal plane was further determined according to the change trend of the peak power density with the distance from the detector to the focal plane.The effects of parameters such as the distance from the detector to the focal plane,the angle of incidence,and the radius of curvature of the meridian plane of the toroidal mirror on the simulated focused spot and its characteristics were studied.In the experiment,the optimal light output condition of the 46.9nm laser was determined,the unfocused spot of the 46.9nm laser was measured,the focusing optical path of the toroidal mirror was set up,and the reflectivity and focused spot of the toroidal mirror were measured.The experiment of 46.9nm laser ablation of copper surface was carried out under different experimental conditions such as the number of laser pulses and the distance from the focal plane using toroidal mirrors with different curvature radius.The optical microscope and scanning electron microscope were used to detect the ablation traces on the copper surface,and the energy spectrum analysis was performed on different areas to study the effects of the above parameters on the ablation results and the damage mechanism.The high single-photon energy of soft X-ray lasers makes them essentially different from long wavelengths when interacting with matter.To study the interaction between46.9nm soft X-ray laser and copper surface,to study the interaction process between soft X-ray laser and metal,and the application of micro-nano etching and single photonionization mass spectrometry detection of soft X-ray laser The direction has a certain reference function.The study of the interaction between the 46.9nm soft X-ray laser and the copper surface has a certain reference role to study the interaction process of soft X-ray laser and metal,as well as the application direction of micro-nano etching and single photon ionization mass spectrometry detection of soft X-ray laser extended from it.