Study On The Effect Of Plasma Discharge Enhancement In Low Pressure Plasma

Low temperature plasma has been widely used in our life,not only in the fields of physics and chemistry,materials and energy,microelectronics and semiconductors,but also in the field of plasma stealth of aircraft and antenna.The fields also have higher requirements for plasma characteristics such as electron density and temperature.The article is aimed to study the influencing factors of plasma characteristics in depth.This paper mainly explores the effect of plasma discharge enhancement by using two kinds of discharge modes of radio frequency discharge and direct current discharge,studies the E-H mode conversion of ICP discharge by using optical fiber spectrometer,and combines Langmuir dual probe detection to make a research about the DC discharge.And the power,pressure,discharge distance and cathode are changed by the dual probe detection,and the changes of the parameters of the plasma and the density of the plasmas are improved.Finally,the experimental results are verified and analyzed by using the COMSOL simulation software.First of all,the relationship between RF plasma discharge parameters is studied by using the diagnostic method of emission spectrum,and the condition of changing discharge in E-H discharge mode is mastered.The transformation from E mode to H mode of ICP discharge plasma in cylindrical discharge device is studied by optical fiber spectrometer.The transformation from E mode to H mode is a sudden change process,and the conversion power will change due to the different gas flow rate,discharge pressure and gas composition.By collecting and analyzing the 419.8nm argon atomic spectrum line and the 434.8nm argon ion spectrum line,the conversion power of the E mode to the H mode is characterized.When the discharge pressure is 60Pa,the E-H conversion power is the smallest.The addition of He in Ar has little effect on the E-H conversion power,and the E-H conversion power changes obviously after joining N₂;with the argon flow rate.With the increase,the E-H conversion power is decreasing.Then,using the Langmuir dual probe plasma diagnosis method,the low pressure DC discharge behavior in the slender quartz tube was studied.The influence of the discharge conditions on the plasma parameters in the slender tube space was discussed,and the segmented glow discharge method was proposed in the long-distance discharge.The results show that the plasma density can be effectively improved by increasing the discharge power and the number of cathode,and that when the discharge pressure is100Pa,the electron density is maximum.The maximum density of the device is 1.03 x1017m-3,and the electron temperature decreases with the increase of discharge power and discharge pressure,and the farther the discharge distance is,the higher the breakdown voltage is,the smaller the discharge voltage is,and the farther the distance of the electrodes is,the DC discharge will be achieved.