Study On The Coating And Detection Of Waveguide Electrode For CO₂ Laser

The copper-copper plate was used the electrode material in the high-power RF slab CO₂ laser.However,the surface of the copper electrode is easily oxidized and electronically sputtered,resulting in unstable discharge and increased waveguide wear.In this thesis,the optical properties of the slab electrode are analyzed,and the thermal deformation of the slab electrode is simulated.The coating experiment of the RF lath CO₂ laser electrode is carried out.The bonding strength,phase composition and optical properties of the coating layer and the copper matrix are tested As well as loss.The main research contents are as follows.?1?The optical properties of A1₂O₃ coatings were analyzed.The RF laser has a CO₂laser wavelength of 10.6?m and its frequency is in the anomalous dispersion region of?-A1₂O_3?The optical waveguide structure is composed of non-stable waveguide mixing cavity.The film is composed of three layers.The middle layer is a gas gain medium with a refractive index of n1.The main components are CO₂gas and the other two layers are the discharge electrode surface.Coating,refractive index n2..The mode output of the optical waveguide is calculated by TE01.?2?The thermal deformation of the electrode was simulated and simulated.The thermal stress and thermal deformation of the electrode are calculated,and the different electrode mounting structures of the screw and the pin are simulated.The distribution of the thermal stress in the free and unrestricted scheme is uniform and the maximum internal stress is 13.5 MPa,and the minimum stress less than 1MPa,much smaller than the screw and pin with the positioning of 2.2GPa and 0.244GPa.?3?The experiment was carried out on the oxygen concentration control experiment with JZCK-500SJ type coating machine and TSU-1200 type coating machine.The O₂concentration increased from 16%to 22%,and the coating layer The color change is black-dark gray-bright gray-transparent.ROFIN electrode bright gray,need O₂concentration of 22%.?4?performance testing of the film.Microscopic detection of coating samples,including SEM microstructure analysis,EDS energy spectrum analysis,the film surface is basically smooth,the thickness of 3.4um or so,and does not contain Cu elements;for high power RF slab CO₂laser electrode samples and ROFIN electrode for a continuous band of reflectivity detection and 10.6um band CO₂laser laser power loss detection,loss of about 10%.The use of A1₂O₃ waveguide dielectric film with abnormal dispersion effect,high temperature resistance characteristics of the effective protection of copper electrodes to extend the life of the electrode and improve the stability of the laser light.