Research And Design Of CMOS Terahertz Detector Circuit

As a new nondestructive detection technology,terahertz detection is widely used in biomedical imaging,safety inspection,quality detection and other fields.The research and design of accurate and portable terahertz detectors become the research direction in the field of nondestructive detection,and it is also a hot topic in the application and research of terahertz technology.It is great meaningful to modern science,national economy and national defense construction.Terahertz detectors constructed by traditional optical methods are huge and expensive,which make them difficult to popularize in the application market.However,at present,the feature size of CMOS devices has entered 10nm,the transistor cut-off frequency f_t breaks through the 500GHz,and the implementation of the terahertz monolithic integrated circuit?TMIC?by microelectronics has been obtained from the process hardware.Compared with optical method,the system realized by CMOS technology has the advantages of small volume,easy integration and low environmental temperature,and has great advantages in terahertz applications.In this paper,a new small multiband terahertz detector chip is proposed to solve the problem of the traditional terahertz detector with a large size and a single detection band.In this paper,based on CMOS process,the structure of the nested terahertz detection circuit with multi loop antenna and a variety of terahertz detector circuits are analyzed and studied,and the function of multi frequency detection is realized.It provides the key to the development of the terahertz solid-state circuit miniaturization and the development of the multi frequency detection technology.Theoretical and technological support will also open up broad prospects for its practical application in the field of nondestructive detection.The contents and results of the specific research are summarized as follows:?1?The principle of terahertz detection based on field effect tube is studied,and the common source structure detection circuit and the common gate differential structure detection circuit are analyzed and simulated,and the performance of different detection circuits are compared.?2?According to the design of single-frequency terahertz detection circuit,a common source detection circuit of the circular and rhombic antenna structure and a differential detection circuit of single-ring antenna are proposed,and the detection frequency 280GHz,290GHz and 320GHz are realized.?3?According to the design of multi-frequency terahertz detection circuit,a differential detection circuit of double-ring inserted differential antenna is proposed,and the detection frequency 600GHz and 806GHz are realized.?4?External expansion circuit is designed for THz detector chip and tested.Test results show that,the optimum corresponding response?R_v?of the dual-ring antenna structure detector?Detector1?at the threshold voltage 0.42V is 366.6V/W,the lowest noise equivalent power?NEP?is 0.578nW/Hz^0.5;The R_v of the circular antenna structure detector?Detector2?is 1286.6V/W,the NEP is 0.211nW/Hz^0.5;The R_v of diamond antenna structure detector?Detector3?is 366.3V/W,the NEP is 0.594nW/Hz^0.5;The optimum R_v of single loop differential points detector of antenna structure?Detector4?is 701.2 V/W,the lowest NEP is 0.261nW/Hz^0.5.