Research And Design Of THz On-chip Antenna In CMOS

Terahertz is the electromagnetic wave with frequency band of 0.1¹0THz(1THz=10¹²Hz),which is a very important frontier research field.It can be widely used in astronomy,electronic information,chemistry,materials science,life sciences and other fields due to the characteristics of low ionization degree,macromolecular fingerprint spectrum and high transmittance.Antenna is the key part of terahertz wireless transmission and communication system,which performance directly affects the receiving quality of terahertz signal.It is difficult to make produce terahertz antenna by using traditional technology due to the accuracy.With the development of CMOS technology,the antenna on chip has solved the problem of precision,but it also introduces new problems,such as the size of the antenna is one of the largest part of the chip,the bandwidth of the antenna is narrow,the gain is low,and the period of circuit test is long,etc.In this paper,based on CMOS process,the theoretical analysis and design method of the terahertz antenna on the silicon is studied.Focusing on the miniaturization and broad-frequency expansion of the antenna on the chip,a variety of terahertz antennas with different structures are realized and applied to the detector and signal source.The specific research work and the innovation point are summarized as follows:1.The theory and method of the miniaturization and broadband design of the antenna on chip are summarized.The circular double arc slot antenna?CDASA?,the diamond diagonal slot antenna?DDSA?and the single ring differential antenna?SRDA?are designed.2.For the dual frequency detection,this paper discard the original slotting technology to realize multi band antenna,and creatively uses the dual-ring nested two-port differential antenna?DRDA?structure to realize dual frequency design.3.For the needs of terahertz circuit test in chip,a novel on-chip antenna structure with a pad is presented in this paper,which can realizes the function of the terahertz circuit test in chip test and radiation of the terahertz signal.The SRDA,DRDA,CDASA and DDSA are taped basing on TSMC 0.18?m CMOS process.In simulations,the size of the DRDA used in Detector1 is 243×185?m².The resonant frequency is606GHz and 792GHz,and the corresponding bandwidths are 8GHz and 14GHz.The gain of the DARA is 7.2dB at 606GHz and 4.04dB at 792GHz;The size of the CDASA used in Detecto2 is293×260?m².The resonant frequency is 300GHz,and the bandwidth is 14.7GHz.The gain of the CDASA is 5.3dB at 300GHz;the size of the DDSA used in Detecto3 is 254×208?m².The resonant frequency is 300GHz,and the bandwidth is 12.67GHz.The gain of the DDSA is 5.9dB at 300GHz;The SRDA used in Detecto4 is same size as the DRDA.The resonant frequency is 300GHz,and the bandwidth is 14GHz.The gain of the DRDA is 5.7dB at 300GHz.The performance of antenna is indirectly reflected by chip test results.The highest response voltage of the Detector1 is 18.3?V at 280 GHz.The highest response voltage of the Drtector2 is 419?V at 290GHz.The highest response voltage of the Detector3 is 109.8?V at 280GHz.The highest response voltage of the Detector4 is 230?V at 290GHz.The antenna on the terahertz chip with pad is taped basing on TSMC 0.65nm CMOS process.The size of the antenna is 434×250?m² with the resonant frequency at 298GHz and the bandwidth of the antenna is 143GHz.The gain of the antenna is 1.1dB at 298GHz,and the direction of the radiation is downward.The terahertz oscillator circuit can be tested on chip by using the GSG probe.