Study On The Performance Of Gold Doped Indium Oxide Nano Film Trimethylamine Sensor

As a wide band gap semiconductor,In₂O₃ has become a good gas sensing material,for the characteristics of transparent and conductive,low resistivity and sensitive to many toxic gases.The performance of traditional In₂O₃ materials is weak.The gas sensing properties can be improved by nano materials and doping.In this paper,the In₂O₃ nano films were fabricated by sol-gel method.In the design of sensor,firstly,the In₂O₃ sol was fabricated by sol gel and nano gold doped with0.2wt%,0.4wt%,0.6wt%,0.9wt%,1.2wt%In₂O₃ sol,then the sol of 0.6wt%,0.9wt%,1.2wt%In₂O₃ prepared were spin coated on the interdigital electrodes,after high temperature heat treatment,we got the In₂O₃ gas sensor.The gas sensing performance of the sensor was tested by gas sensing system.The gas sensing test showed that the In₂O₃ nano film sensor has a high sensitivity to trimethylamine gas,and the working temperature is 140?.The sensitivity of gold doped In₂O₃ nano film to trimethylamine is higher than the undoped In₂O₃.The results show that the doping of nano gold can improve the sensitivity of the sensor of In₂O₃nano film.Furthermore,the gas sensing properties of the nano gold doped with 0.9wt%indium oxide nano film is better than that of the 0.6wt%and 1.2wt%In₂O₃ nano film.Therefore,the best of the nano gold doped is 0.9wt%.The optimum working temperature of nano gold doped indium oxide nano film is 140?.This paper not only analyzed the sensitivity and temperature test,but also the gas selectivity,response time,stability test,the experimental results show that gold nanoparticles doped indium oxide sensor has better gas sensitive properties.