Preparation Of Nano-TiO₂ Film By Sol-Gel Method

The nano-TiO₂ film of pure and Ce-doped were successfully prepared on glass substrates by sol-gel method. The influence of sol composition solvent water volume were analysed. Indicated the relation of the thickness and the number of the film. Since a large number solvent evaporation caused residual stress, when film roast can easily split. In experimentation we found that if we added some ployglycol in the sol, the film can be prevented to chap effectively. After heat treating to the film in 450-550°C, XRD test analysis showed that pure TiO₂ film consists of both the anatase phase and the rutile phase and the film of Ce-doped were all anatase phase. The temperature from anatase change to rutile phase could be enhanced and the film size growth could be controlled by doping Ce.Then we produced TiO₂ oxygen sense organ. The oxygen-sensitivity, resistance-temperature, relationship between the dope and resistance were tested. The result indicated the TiO₂ film had the certain oxygen sensitive characteristic, doping Ce could reduces the film resistor, enhances the oxygen sensitive...