The Nano-Mechanical Property Research For Single Crystal Sillicon Carbide Corrosion Film Based On Fenton Reaction

This paper describes a research of CMP theory from the mechanism which optimize catalyst of Fenton reaction corrosive liquid, measure mechanical property and surface micro-topography of single silicon carbide corrosion layer of Fenton reaction mainly by Nano-indentation and Nano-Scratch method. For more contents and conclusions of this research paper, please read below.Using five different valence states iron compound as catalyst, author manufactures corroding samples by Fenton reaction. Utilizing Nano-indentation device, hardness and modulus in different depth is measured, to seek the best iron compound catalyst. Then structure of single silicon carbide after corrosion is analyzed by using X-ray diffractometer. The surface micro-topography and chemical component is tested by scanning electron microscope and energy dispersive spectrometer respectively. Draw the conclusions that chemical component of different catalyst is same. Both the Result analyzed from theory and test result believe consistently that corrosion layer is SiO2, which is about 2GPa hardness far below 39GPa of silicon carbide. By comparing the catalytic effect of different catalyst, author come to the conclusions that the rank of Fe3O4>FeO>FeSO4>Fe2(SO4)3>Fe2O3 is catalytic effect order, which confirm the theory that Fe2+ play the key role Fe3+ play the supporting role in Fenton reaction. In general, Fe3O4 has the best catalytic effect in this five catalysts.By controlling the length of corrosion time, author analyze surface corrosion layer made by Fenton reaction on single silicon carbide polished wafer which is based on the substrate effect theory of soft film hard substrate system. It comes to conclusion that surface mechanical property is changed and corrosion layer are generated after one minute since Fenton reaction begin. As time goes by, the increasing thickness of surface corrosion layer is analyzed, which is showed by boxplot. The analysis about Fenton reaction corrosion layer, lay the basis for coordinating the synergistic effect of chemical reaction and mechanical action in the future.Using Nano-scratch method, author measures critical load between corrosion layer and substrate, which is compared with origin polished silicon carbide wafer. The experiment, considered different length of corrosion time and different scratch velocity, is designed to study the effect on critical load. It draw the conclusions that there is no connection between corrosion thickness and critical load which is between corrosion layer and substrate. The critical load on different thickness corrosion is constant, when the scratch velocity is fixed. If the scratch velocity is changed, the critical load will change inversely. When the scratch velocity is decreased, the critical load is increasing and vice versa. Theoretical basis of synergistic effect between Fenton reaction and load of polishing disk is provided by research result.