Study On The Pressure And Temperature Distribution Of The Experimental Chamber In A Specific Structure

The development of microelectronics and semiconductor technology is the foundation stone of the development of the"Internet+".At the time,In semiconductor factory,Process chamber interior heat and flow field uniformity is one of the key factors affecting the quality of sedimentary process.The design of Specific structure experimental chamber adopts modular thought.The structure of chamber parameters?chamber height,chamber size,in and out of the port diameter?and the process parameters can be easily to adjust for experiment as need,so as to provide the data experiment platform for modeling,simulation and designing,and to reduce the cost and time for designing IC devices.The paper investigated the specific structure experimental chamber interior heat and flow field on the basis of the experiment.Article mainly had carried on the experimental method design,edesign and construction of experimental facilities,Leak rate detection of chamber,the feasibility of the pressure tube.The measurement of pressure differences in chamber during dynamic gas flow and bearing surface temperature measurement experiment and bearing plummer surface temperature measurement.The chamber system were estimated by using the static pressure leakage rate for whole is 8.84×10^-6Pa·m³/s.The results showed that the development of the specific structure of experiment platform had reached the requirement of the vacuum experiment and proved the feasibility of the three kinds of experimental method.Based on the pressure tube method to measure interior point pressure in chamber,and analyze the length of tube to measure the pressure tube and the accuracy of response time,analyze the length of tube on the accuracy and response time.The results show that Interior pressure in chamber is greater than 3 Pa,the pressure tube method is used to measure the vacuum intraluminal pressure is feasible.Based on the pressure differences relationship with the average flow velocity to analyze the factors affecting the accuracy of measuring pressure tube method.The results show that the secondary gas plate can make the air flow to achieve the effect of uniform and the measurement error of pressure tube associated with air inflow and cavity interior flow velocity of chamber.In the specific structure experimental chamber,The methods of fixing chamber diameter and the gap between bearing and plate,changing the inlet flow rate and chamber pressure,TCwafer sensor to measure surface temperature of the bearing were used to study the bearing surface temperature distribution relation between chamber pressure the inlet flow.The results show that surface temperature showed a trend of decrease gradually from center to edge.At the bearing pedestal heating temperature and inlet flow conditions,the surface temperature of the bearing platform with intraluminal pressure increases,and the rate of temperature rise will be slow.At the same time as the interior chamber pressure increases,the radial temperature change on the size of the smaller.At the bearing pedestal heating temperature and chamber pressure conditions,the surface temperature of the bearing platform with inlet flow increases,and the rate of temperature rise will be slow.At the same time as the interior cavity pressure increases,the surface temperature uniformity affected by flow rate is small.