The Research And Application Of Semiconductor Wafer MES System

With the development of the domestic economy and the globalization of world economy, the semiconductor wafer companies are facing a growing competition. Semiconductor wafer companies have to keep improving their manufacture capability and adaptation, to meet customers’ changing demands so that they can survive in the fierce competition. Therefore, the semiconductor wafer companies need to establish a complete solution for MES(Manufacture Execute System), which will be helpful to the growth of business, and improves the information communication and company’s adaption. It could be said that MES system has been more and more attractive to manufacturing companies, semiconductor silicon companies need to establish a MES systems which fits for their own situation.The research of this paper is based on the current status of semiconductor wafers manufacture. The goal is to establish a MES for semiconductor wafer companies. This paper analyzes the necessary and specificity for semiconductor wafer companies’ MES, established a specific direction and scope of the research. The design and implementation of system involved the advanced object-oriented design, J2 EE technology, and Model Language, etc. The main research of this paper includes the following as below:(1) Analyze semiconductor wafer company’s manufacture workflow and specialization; determine the shortcomings and deficiencies of the current MES;(2) By model language technology, analyzed and established the business model for semiconductor companies and MES, determine the system’s operational environment;(3) Design semiconductor MES’s function, system structure, and network, using drill-down approach to detail design the main function modules of MES system, build related data model;(4) Introduce the JBPM workflow technology to MES’s production system to achieve the intelligent and automatic management on manufacture management, quality management, and process control;(5) Using the J2 EE technology to analyze the MES’s process, and analyze the test results by the test cases.By establishing the MES system for semiconductor wafer companies, the MES can improve companies’ control of equipment, quality and manufacture, and gradually form a tracing tools and platforms to trace variety of information, including the methods, results, work center, operators, process and product date, etc. To establish an efficient MES system, which fit for the semiconductor wafer companies, will not only good for encourage the employees but also increase the companies’ profit. Meanwhile, the experience of establish this MES system in the semiconductor wafer companies, will also benefit for the research of MES in other companies.