Study On Thermodynamic Of CCD Detector Damage Induced By Millisecond Pulse Laser

In this paper,the thermo-dynamical damage process of the interline transfer type color area array CCD detector irradiation by millisecond pulsed laser is studied theoretically and experimentally.Based on the heat conduction equation and the thermoelastic mechanical equation,a three-dimensional thermo-mechanical coupling physical model of the multi-layer structure of the interline transfer type color area array CCD detector is established.Aiming at the special structure of the interline color CCD detector,the simulation of the damage process of the interline transfer CCD induced by millisecond pulsed laser is carried out by using COMSOL Multiphysics finite element simulation software.The temporal and spatial distribution of transient temperature field and stress field under different laser energy density and pulse width are obtained,and the change law of the temperature field and stress field is analyzed.In the experimental research,the damage test system of the interline transfer type color area array CCD detector with millisecond pulsed laser irradiation is established,and the thermal damage process of the interline transfer type color area array CCD detector with millisecond pulse laser irradiation is experimentally studied.The changes of center temperature,surface topography,video image,pin impedance value and reset clock signal of the CCD with laser energy density and pulse width are obtained and experimental results are analyzed.it can be found that the law is basically same in comparison of simulation and experimental results.The results show that the thermo-coupled model is accurate.Based on the theoretical and experimental research on the thermal damage of the interline transfer type color CCD detector irradiation by millisecond pulsed laser,the conclusion is drawn that the destruction of interline transfer type color area array CCD detector is mainly caused by thermal stress damage.The results of this paper provide a theoretical basis for laser damage to CCD detectors and improvement of laser processing technology.