Numerical Simulation Of Thermal-Mechanical Effects During Millisecond Laser Irradiate Semiconductor Materials

Research on laser-matter interaction has great significance in many fields, such as medical science and mechanical processing. Millisecond laser-matter interaction developed rapidly in recent years, and attracted much attention. The numerical simulation of thermal-stress effects caused by millisecond laser irradiation of semiconductor materials is the main research contents in this thesis.Firstly, thermal-stress coupled physical model that millisecond laser semiconductor interaction has been established in this thesis. And then, analytical and finite element methods are applied to simulate the thermal-stress coupled physical model. Metal-semiconductor baitlayer systems’ simulation method is analytical method, and COMSOL which is commercial finite element software is applied to simulate the thermal-stress effects of silicon. According to calculation, temperature and stress distribution on the material target in the process of laser interaction are obtained. Finally, variation laws with time and space are summarized from numerical simulation results.