Design Of Reactive Ion Etching Machine Automatic Control System

Driven by the mobile Internet,cloud computing,large data,Internet of Things and other emerging applications area,the global semiconductor industry showed a sustained growth momentum.With the new materials,new structure proposed and the fine size of the characteristics in the semiconductor technology,the Semiconductor equipment manufacturing is facing new technological challenges.Semiconductor equipment,large cost,so has caused part of the cost pressure to the process of China's semiconductor industry.Among them,the application-oriented semiconductor devices for scientific research are also approaching in the direction of miniaturization and embedded system.Reactive ion etching equipment is one of the key equiment in very large scale integrated circuit manufacturing field,reactive ion etching equipment in scientific research plays an indispensable role.The reactive ion principle is that when a high frequency voltage of 10 to 100 MHz is applied between the plate electrodes,an ion layer of several hundred micrometers thick is generated,a sample is placed therein,and ions are impacted at a high speed to complete the chemical reaction etching.Based on the etching principle,the reactive ion etching machine was set up.The electrical control system and the control software were programmed,and the experiment of reactive ion etching was carried out.At the same time,the application of low cost control system based on embedded system in small reactive ion etching machine is studied.Based on the mechanism of reactive ion etching,the equipment control system is built.Based on the data acquisition board and the industrial computer,signal acquisition and module communication are completed.Based on the LabVIEW software,the device control program is compiled and some automatic process flows are integrated to complete the equipment system construction.Based on the practical application of the equipment system,this paper further adopts the industrial control board based on STM32F107 chip,integrates the power distribution,signal acquisition and module communication into one,and completes the design of the integrated cabinet.Integrated equipment core module,completed the electrical control partof the hardware equipment to build the work.Based on ?C / OS-II real-time operating system for module communication and control software.Real-time communication,low-cost equipment characteristics,and test its system performance,the practical application.