Design Of A Novel MEMS Gyroscope Array

Due to the advantages of miniaturization, low cost and consumption and high-integrated,MEMS, a novel gyroscope, which is no longer confined to apply to aviation, aerospace and marine navigation,while it' s widely used in all kinds of areas related to human. In the future,it has a great potential in navigation, communication and medicine fileds.The MEMS gyroscope has developed for recent decades, however, today still has some problems. Conventionally, the MEMS gyroscopes usually desgin drive-mode and sense-mode as 1-degree-of-freedom (DOF) structure, which can achieve a decoupling effect to some extent. But this structure is so vulnerable to external environment that leads to seriously decreasing stability. In order to improve robustness and stability of system, multi-DOF MEMS gyroscopes structures have been proposed. These structures improve the bandwidth by increasing DOF of the drive-mode and sense-mode. However the proposed multi-DOF MEMS gyroscopes improved system bandwidth to some extent at the cost of the sensitivity.In order to overcome the coupling between the two modes and limits between bandwidth and sensitivity, this paper research mainly consists three parts. Firstly ,it's decouple design of MEMS gyroscope structure. Model coupling is an important source of error affecting the accuracy of the MEMS gyroscope . Therefore , this subject trys to eliminate the coupling between the two modes through the sound structure designing. Secondly,it' s improvement of MEMS gyroscope stability, which is a guarantee of its normal work. This subject trys to improve the initial stability through the structure designing. The last one is the improvement of MEMS gyroscope sensitivity, this subject try to improve the system sensitivity through improving the gain of the MEMS gyroscope at the conpensate of weak output signal detection.Firstly, this subject integrates 1-DOF drive-mode MEMS gyroscope units proposed,then presented a novel MEMS gyroscope array which can realize decoupling effects between two models. Compared to the traditional structure, this gyroscope array could eliminate mutual limits among gain, model size and detection capacitance. The simulation results reveal that the sense-mode of the gyroscope array is insensitive to external environment and the sense-mode gain of the gyroscope array increased by about 5dB compared to the gyroscope unit. However, the drive-mode of the gyroscope array is so sensitive to environmental change that leads to the bad system stability . Then, to overcome this problem, this subject proposes a improved MEMS gyroscope array structure with a 2-DOF drive-mode and solved the problem that the weak stability of 1-DOF drive-mode. From the simulation analysis, the improved gyroscope array has the better stability, anti-interference ability, sensitivity and shorter dynamic response time compared to the unimproved gyroscope array.