Precision Control Technology For MEMS Triaxial Gyroscope System

With the continuous development of science and technology, MEMS triaxial gyroscope is widely used in various fields due to its low cost, high accuracy, small size, good reliability, and so on. In this thesis, three simple but effective algorithms are proposed for precision motion control of this MEMS triaxial gyroscope.First, a PID position control algorithm that is not based on model is proposed. The global asymptotic stability of the closed-loop system is proved by applying the Lyapunov stability theory and LaSalle’s invariance principle. It is verified by numerical simulations that this control algorithm has the ideal control performance. Based on advantages of the sliding mode control that high robustness against parameter variations and insensitive to disturbances, a sliding mode PD control algorithm is proposed for trajectory tracking of the MEMS triaxial gyroscope.The global asymptotic stability of resulting closed-loop system is proved.In order to eliminate the chattering, the saturation function vector is introduced, and the simulation results show that the system still has good control performance. For ease of engineering implementation, a position feedback PID control algorithm is proposed, which is only based on position measurement. Lyapunov’s direct method and LaSalle’s invariance principle are employed to show the global asymptotic stability of the closed-loop system. Numerical simulations is carried out to show the effectiveness of the proposed control.