Structure And Parameter Optimization On Nanometer Time Grating Displacement Sensor

With the development of high-end equipment manufacturing industry,nanometer displacement measurement technology has attracted more and more attention.And in making integrated circuits,a plurality of field processing machinery parts manufacturing and defense industry have a great demand.However,the contradiction between the large range and high precision always restricts the further development of nanometer displacement measurement technology.The development of the most mature technology of nanometer grating,the measurement principle determines the gate line structure it needs to make the uniformity and consistency of the processing of large range,it is difficult to guarantee.The development of the most mature nanometer meter grating technology,the principle of its measurement determines the grid structure of the need for uniformity and consistency of the manufacturing process for a large number of processing is difficult to guarantee.At the same time,the measurement and manufacture of the grating are limited by the diffraction limit,so the precision is difficult to be improved.Therefore,the authors' laboratory group through long-term on nanometer meter measurement technology research,put forward through the research idea of time measurement space,space measurement datum by the amount of time,so as to improve the displacement measurement accuracy.Under the guidance of this idea,a new nanometer time grating displacement sensor is developed by using the electric field of orthogonal transformation.Under the guidance of this idea,a new kind of nanometer grating displacement sensor is developed by using the electric field of orthogonal transformation.Although the measurement accuracy through the "structure of reflector" can make the sensor to reach nanometer level.However,the relationship between the sensor structure parameters and the measurement accuracy has not been studied thoroughly.This paper mainly focuses on the structure parameters of nanometer time grating sensor is analyzed and the related optimization design,mainly includes: 1.Introducing the nanometer time grating measurement principle and structure,and improve the measurement model,the structure parameters and the output signal in order for a single expression.2.From the perspective of structural design,the "point" to "side" of errors in measurement results carried out a detailed theoretical analysis,analyzed the rule sheet shape,set the scale effect on both sides of the overall lead and double row structure on the measurement accuracy.3.The experimental platform is built,and a lot of experiments are done.It is verified that the two sides lead will bring the first harmonic error to the measurement result,and the two harmonic error will be introduced in the measurement result;On this basis,the optimal design of the structure is put forward,and the single row type nanometer time grating structure is proposed.The validity of the optimized desig n is proved by experiments,which can further improve the measurement accuracy of the sensor.Finally,the experimental results show that the accuracy of the sensor can reach ±200nm within the range of 200 mm measurement.Through the research on the structure parameters of the nanometer time grating sensor,measurement accuracy impro ved,and further improve the nanometer time grating measurement theoretical system,has certain guiding significance to the theoretical analysis and experimental research in the future.