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Analysis And Control Measures Of Organic Hazards In TFT-LCD Lithography Process

Posted on:2018-11-04Degree:MasterType:Thesis
Country:ChinaCandidate:T T WangFull Text:PDF
GTID:2348330515996866Subject:Safety engineering
Abstract/Summary:PDF Full Text Request
China youth daily social survey center had a survey of 2062 people about "most want to buy in 2015".According to the survey,41.4% of the respondents want to buy electronic products,the purchase of electronic products has become a modern society people's rigid demand,electronic products and related services consumption is becoming a new growth point.China is the biggest consumer country on electronic products and it's an important electronics manufacturing superpower in the world.Since the 21 st century,we have a series of major technological breakthrough in the electronic manufacturing industry,and we quickly became the world's largest manufacturing base.In the thin film transistor liquid crystal display(TFT-LCD)industry,with the continuous construction of the new plant construction and stable operation of the factory,a lot of new safety and occupational health problems have begun to emerge in the industry.One of the most prominent is the use of a large number of organic compounds in the lithography process,the organic compounds is extremely volatile,very low odor threshold.And the main component of these organic compounds in the corresponding national standard of occupation health is not stated in the exposure limit,not even detection method of national standard.A variety of volatile organic hybrid is difficult to define the joint damage effect,which makes a lot of people began to worry about the health effects of these organic compounds on their own.At the same time in the industry occupation health and safety management personnel and even the factory leader brought a lot of troubles and pressure.This paper on a thin film transistor liquid crystal display(TFT-LCD)organic manufacturing enterprises exposed serious process analysis.The evaluation of these organic compounds,the hazard sources and hazards analysis.Through the detection method to determine the key regional distribution of organic matter exposure,find the key control equipment.According to the characteristics of special process,clean workshop ventilation,the organic matter in the process of smell source comprehensive evaluation.Through its spread situation,formulate control measures,achieve the goal of improve the working site.
Keywords/Search Tags:Lithography, Volatile organic compounds, VOC, Photo Resist
PDF Full Text Request
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