Design And Implementation Of Immersion Control System Based On Domain-Specific Language

Immersion system in immersion lithography equipment,which refers to air and water purification,hydrodynamics and temperature control field,includes Pure Water System(PWS),Horizontal Compensation Water System(HCWS),Compensation Air System(CAS),Horizontal Air Water Extraction(HAWE),Temperature Control Module(TCM)and Magnetic-lecitation Gravity Compensation(MGC).These immersion liquid control systems differ from independent function and operation with complicated process.The Main Control Module(MCM)in this paper takes the charge of coordination control,like parameters monitoring and setting,interface communication,logic control,data storage and man-machine interaction.This paper designed a suitable Domain-Specific Language(DSL)on immersion system in immersion lithography equipment between domain specialist and software programmer,in order to improve the communication and process design efficience on air and water purification,hydrodynamics and temperature control field.In order to reach those requirements,this paper accomplished tasks as below.Firstly,the background of project was introduced.The basic theory of immersion system constitute is analysed.The general scheme of main control module is explained and the project contents are proposed.Secondly,according to the logic framework and some key components,we designed the MCM hardware platform and accomplished the system integration and accembling.Then,the control system software framework,which contains execuing procedure,status switching,event trigger and system data,is analysied and designed.The communication mechanism,server client integration scheme,is confirmed.Then,we designed the suitable DSL based on status switching,including system data XML and logic control DSL in immersion system.It can create the abstract syntax tree(AST)and semantic model according to corresponding lexical and grammatical rules.It can even create the program code in the project.Finally,the basic functions of main control module in immersion system is tested.The effectiveness of system data XML and logic control DSL is verified.