Study Of Crosstalk Characteristic Of Graphene Interconnects

Interconnect issues,such as the degradation of thermal property,the increasing of metal resistivity and the serious reliability issue,have attracted much attention with the continuous development of integrated circuit(IC) in the last few years and will be even more serious in the nanoscale VLSI(very large scale integrated circuit).ITRS(international technology roadmap for semiconductors) has predicted that the rapid increasing of the resistivity of copper wire due to scattering at the edges and by the defects and phonons will affect signal integrity severely with the decreasing of feature size.Since interconnect issues play the dominant role in signal integrity,research on crosstalk between wires becomes particularly important.Carbon nanomaterials,including carbon nanotube and graphene have been considered as potential interconnect materials because of their unique electrical,thermal and mechanical properties. Grahpene is more controllable in the horizontal direction during its implementation and has more conduction channels in the same size,so it can make a better performance in current IC region than carbon nanotube.In this paper we discuss the energy band structure of graphene according to related quantum electronics theory and furthermore, extract the equivalent circuit parameters and model of monolayer graphene nano-ribbon, based on which the influence of relevant parameters to crosstalk has been studied.The equivalent circuit parameters and model multilayer graphene nano-ribbon are also extracted with coupling between layers treated appropriately and the influence of crosstalk to signal transmission is studied under 21 nm and 14 nm node with parameters taked from ITRS2013.As a result of the analysis of simulation waveform,crosstalk will be weaker when multilayer graphene nanoribbon is used as global interconnects than when it is used as local interconnects,and crosstalk between adjacent wires will not cause mistake on signal transmission under 21 nm and 14 nm node.The discussion about the performance of multilayer grahpene interconnects in the future IC and the analysis of the equivalent circuit model provide some suggestions and guidance for the application and fabrication of graphene nano-ribbon.