Research Of The Redistribution Of Trichlorosilane

In recent years,the process of producting polysilicon through silane has been paid more and more attention because of the advantages of small investment,low energy consumption,low cost and non-environment pollution.A research of the kinetics of the redistribution of trichlorosilane and the drying characteristics of resin catalysts were studied.The work can provide technical support and theoretical guidance for industrial.The drying characteristics of macroporous weak basic anion exchange resin PA100 and A-21 were analyzed,and the semi-empirical drying correlations of the two resins were also established.After a series of discussions,the results show that the drying characteristics of resin PA100 and A-21 are similar,and the best drying temperature and the best thickness of material are 70 ? and 3cm.The drying of resin PA100 needs about 23.0 h until the water content is reduced to 5% and A-21 is about 23.7 h. Under the best drying condition,the resin PA100 has a higher amine content than A-21.The redistribution reaction of trichlorosilane(SiHCl3,TCS) was studied by using eight different kinds of catalyst in a high pressure batch reactor.Effects of catalyst quantity,particle size,operating temperature and reaction time were examined.The reaction kinetic parameters were obtained by the the conversion of trichlorosilane change on reaction time.It has been found that the best condition for the conversion of trichlorosilane is at 343.15 K and mass ratio 0.1334gcat·gTCS-1 by using PA100 as the catalyst.The kinetic data analysis suggested that the reaction is second order for the forward and the backward reaction.The pre-exponential factor and activation energy are 5.292m3·kmol-1·s-1 and 9.199 kcal/mol for the forward reaction,the pre-exponential factor and activation energy are 4.779m3·kmol-1·s-1 and 5.544 kcal/mol for the backward reaction.Comparing the calculared values obtained by using the obtained kinetic equation with the experimental values of PA100 in 343.15 K,the margin of error is less than five percentage points.The results indicate that the model exhibits high fitting precision for simulation.