Research And Development Of Laser Micromachining Online Detection System

With the rapid development of laser processing technology, the corresponding surface topography measurement technology is also developing rapidly. In the field of laser micromachining, surface roughness and the size of the etched workpiece is the most important parameter of the surface morphology evaluation. Among them, the surface roughness is used to describe the microscopic geometry error of the workpiece, it is an important indicator for evaluating the surface processing quality which directly affects the performance and life of the workpiece, and accurate measurement of the etched size also has a very important role, which directly determines the processing precision and can compensate for the processing errors due to other factors(such as spot size, thermal effects, etc.). At the same time, the dimensional measurements of the fine structure has become one of the important topics of nano-measurement technology and measurement standards, which has been widespread attention in the world.In this context, this paper study and develop a set of laser micromachining online detection system, including the following three aspects: laser line detection system architecture design, data processing technology research and application software development. laser line detection system consists of a laser sensor, three-dimensional precision displacement platform and computer, and integrated into the laser processing system, constitute a set of processing and detection as one complete system. About the data processing technology, for the noise of measuring process, the paper researches and designs Butterworth noise reduction filter, for the filtering, the paper researches and designs two methods, one is the least squares filtering, the other is Gaussian filter, and solves the problem of tilt step by leveling outline. Concerning the software, the paper develops a application software which has beautiful interface and easy operation experience, the software consists of equipment control software and data processing software, which can achieve the on-line measurement function. The experiment part, through the online processing and detection experiments of large numbers of samples, and test results of Dektak 150 Surface Profiler surface profile measuring instrument for comparison and constantly revised, the laser micromachining online detection system can reach 1.6?m online detection accuracy, and has good reproducibility, stability and reliability.In this paper, the development of the use of laser micromachining laser line detection system for online testing of the workpiece surface quality and size, which greatly improve the processing efficiency, improve the machining accuracy, but also save a lot of test material and non-contact measurement method will not damage the sample surface, while the large measurement range and relaxed environmental requirements provides the necessary conditions for measuring the three-dimensional surface.