Design And Model Simulation Of A 13.56MHz RF Power Supply For Fast Axial Flow CO₂ Laser

Radio Frequency(RF) power supply as one kind of excitation source for Fast Axial Flow(FAF) CO2 laser, is the crucial part of the laser to maintain the stability of tube discharge and improve the injection of power density. Aiming at the problem of the traditional vacuum tube RF power supply has the weakness of short life, low conversion efficiency and large volume, based on a new type of CLASS E power semiconductor devices, this article presents an effective scheme to develop RF power supply, which can work in 13.56 MHz and single module can generate the output power of 800 watt. Also, it has the characteristics of small volume, low cost and easy to extend. This thesis mainly has the following several aspects:Firstly, this article analysis the theory of laser discharge tube and calculates the related parameters of the tube. The characteristics of the different working conditions of RF power amplifier is analyzed according to the characteristics of the different working conditions, and a practical scheme is selected.Secondly, a suitable power amplifier chip is accepted according to the actual circuit design requirement of FAF Laser and the characteristics of different topologies scheme are analyzed. An appropriate circuit topology scheme is accepted according to the actual circuit design requirement and relative circuit parameters are deduced. On this basis, PSpice is used for modeling and simulation of available corresponding amplifying chips, as well as for optimizing the design parameters.Thirdly, based on the analysis of key points of RF power driven design, including the working frequency stability of the power amplifier, drive current and voltage requirements, a suitable driver chip is chosen. Then the peripheral design scheme of the driver stage and the corresponding power supply scheme is given.At last, the total hardware design of power supply is completed, including the design key points and matters needing attention and so on. Meanwhile, through the joint debugging of the whole power supply scheme, the feasibility of the design scheme is verified.