| The micromanipulator,as a key technology of precision positioning,has been widely applied in various fields,which meet the requirements of micro nanoscale assembly and positioning accuracy,such as medical,bioengineering,micro manufacturing,integrated circuits,aerospace and so on.The precision positioning of the micro positioning system requires the end execution part,the control system,the driver,the micro displacement detection device and so on.However,the micromanipulator,as the end execution part of micro nano positioning system,plays a very important role in the whole system.Therefore,the design of the micro-manipulator stage will directly affect the accuracy of the entire micro-nano positioning system.This article mainly studies the structural design of micromanipulation stage.The main goal of this study is to realize the large travel and high resolution of the micromanipulator.In order to achieve this goal,a new type of the micromanipulator is designed by combining three kinds of flexure hinges,namely,straight beam flexure hinge,straight circular flexure hinge and flexible ball hinge;In order to increase the workspace of the micromanipulator,we choose piezoelectric actuator as a driver and design a bridge displacement magnification mechanism to increase output displacement on the choice of driving mode;In order to realize the rotation of the X and Y axis and the translation along the Z axis,the three branch chains of the stage are designed to be symmetrical in 120 degrees.The specific research process is as follows: In this paper,we first established the kinematics model of the micromanipulator,deduced the formula of its inverse kinematics and positive solution,and solved the position solution of 10 micromanipulation stage randomly,and analyzed the kinematics with ADAMS software.Then the static equation of the micromanipulation stage is derived,and the amplification ratio of the bridge type displacement amplification mechanism is solved.Then,according to the Lagrange dynamics equation,we set up the dynamic model of the micromanipulator,and deduced the natural frequency formula of the bridge displacement amplification mechanism and the micromanipulator.Finally,with the help of finite element analysis software ANSYS Workbench,the static and modal analysis of the micromanipulation stage is carried out,and the accuracy of the theoretical calculation is verified. |
