Design And Analysis Of A 2-DOF Parallel Micromanipulation Platform

Micro-nanopositioning is one of the important technology of precision operation,it can be used in many fields,such as aerospace,bio-engineering,MEMS assembly that accuracy is required for micro/nano level,and is one of most advanced technologies.In order to achieve precision positioning,the micro/nano operating system generally includes the end of the executive part,the control system and micro displacement detection device.Micromanipulation platform performs as the end part of the operating system whose importance is self-evident,and the stand or fall of platform design is directly related to the accuracy of micro operations.This paper mainly investigates on the structure design of micro-displacement platform,and a simple piezoelectric actuator control strategy is discussed.By reading lots of literature,a deep understanding of the development trend of micro platform is acquired.Designing a high precision and large travel micro-displacement platform is selected as the research target.Two degrees of freedom parallel micro-displacement platform based on right-angle flexible hinge is made up of bridge-type amplification mechanism,and compliant parallel four-bar mechanism of linear guides.2-DOF parallel micromanipulation platform can provide along the X,Y axis movement,the parallel platform can manipulate object from different directions into the center of vision.The compliance of micro-displacement platform is calculated by analyzing a quarter of the micromanipulation platform through the matrix method.And the natural frequency is deduced through the Lagrange method.The matrix method and the Lagrange energy method are respectively adopted to conduct the statics and dynamics analysis of platform.Meanwhile,the amplification ratio is derived by analyzing the input compliance of 1/4 bridge-type amplification mechanism through the matrix method,and then the paper is focused on discussing the impact on the parameters of the magnification in the formula by using MATLAB.In order to verify the correctness of the theoretical analysis,finite element static and modal simulations are carried out on the micromanipulation platform.Piezoelectric actuator's advantages make it suitable for the driver of the 2-DOF flexible platform,but its inherent defects affect the operation accuracy of platform.Therefore,piezoelectric actuator is controlled by closed-loop control method.Piezoelectric actuator's control method is simply designed at the end of this thesis.