Research On Feature Oriented Modeling Method For MEMS

Micro component is an important part of micro electro mechanical system that has been widely used in industry.Therefore,the designing method for fabricating processes of micro devices is very important.At present,the designers for micro component not only need to grasp design knowledge,but also think about the processing technology of micro devices.Thus,the exploitation periods of the equipment become longer,and design efficiency becomes low.With the development of design methodology,the advanced reverse design method was proposed,which allows the designer to build the structural model firstly and then derive the process information.The key technologies to support this method are processes stratification and mask derivation.To realize the design idea with the enable technologies,this paper applies the directed graph to implement process stratification based on the three-dimensional modeling of Micro Devices.Then,according to the MUMPS process,the mask derivation algorithm is proposed and applied to construct the mask information of the process layers.We built the application through the MFC framework in the VC++ environment and took the typical micro devices as example to build models in this framework.Meanwhile,based on the model built,the directed graph-based searching method together with interactive judgement method is built to construct every process layer.The deduction of the mask layout process is carried out for each process layer by geometric elements extraction and model operation.The method has been verified in the developed platform,which made technological contribution for the advanced design theory of micro device.