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Keyword [surface micromachining]
Result: 1 - 7 | Page: 1 of 1
1.
Study Of The Design And Fabrication Of The MEMS-DMs
2.
An Electro Thero-Actuated Bidirectional Bistable Mems Relay And Its Integrated Micro Fabrication
3.
Mems Micro-deformable Mirror Design And Thin Film Residual Stress Control Study
4.
Optimization Design And Fabriation Of Unidirectional MEMS Inertial Switches
5.
Research On Feature Oriented Modeling Method For MEMS
6.
Three-dimensional Surface-Miacromachining Process Simulations Based On The Narrow Band Level Set Method
7.
Study On The Contact Enhancement Method And Shock-Resistibility Mechanism Of A MEMS Inertia Switch
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