Research On The Step Peristalsis Precision Piezoelectric Actuator Excited By Low Frequency Pulse

With the rapid development of precision machining, micro-nano manufacturing and other fields in recent years, the development of precision driving and positioning technology becomes the foundation in the field of manufacturing and the key technology to be solved. Piezoelectric drive is a new way of the drive. It is rapid development accompanied by piezoelectric element and magnetostrictive materials. It has the advantages of simple structure, high resolution, high power density, high positioning accuracy, fast response, selflocking and no electromagnetic interference. Therefore, the piezoelectric drive technology has important scientific significance and value in the precision field.In this paper, a step peristalsis precision piezoelectric actuator is designed. The working principle is analyzed. The structure which is the H structure symmetry is design, according to the working principle of the piezoelectric actuator. The selection of its material and structure is analyzed by ANSYS software. The simulations of the step peristalsis precision piezoelectric actuator are analyzed, including static analysis, modal analysis and transient analysis. This provides the basic theory for the step peristalsis precision piezoelectric actuator.The drive power supply is designed. The drive power supply includes hardware component and software component. The hardware includes control circuit, high voltage circuit, drive circuit and the basic regulator circuit. The software comprises the programs of control signals, voltage sampling, LED display and the communication of serial ports. The drive power supply is designed and debugged. And its voltage can be changed in 200 V and its frequency can be changed in 100 Hz. It has the strong ability to drive and small ripple. The power signals and the control signals analyzed by the working principle of the step peristalsis precision piezoelectric actuator are same exactly and it has over-current protection function.In order to verify the performances of the step peristalsis precision piezoelectric actuator, a piezoelectric actuator experimental test platform is designed. The experimental test platform is mainly composed of the step peristalsis precision piezoelectric actuator, the clamping device, the drive motion rails and the preload devices. The capacitance micrometer is selected as the measuring sensor. The repeatability of the step peristalsis precision piezoelectric actuator is good.The step is approximately linear to voltage and the slope is 0.01μm/V. The maximum force of the measuremental experiment platform is 4.7N. The speed increases by increasing voltage and increase first and then decrease by increasing frequency. The stable working frequency of the step peristalsis precision piezoelectric actuator is 30 Hz and the fastest speed frequency is 70 Hz.