Optimal Design Of Microwave Reconfigurable Equalizer Based On RF Mems Switchs

Microwave power equalizer can improve the amplitude frequency response characteristics of the RF signal, so it is widely used in RF signal system. With today’s rapid development of the wireless communication technology, radar, microwave communications, satellite communications, mobile communications and other systems or equipments, all raise higher flatness requirements on the amplitude frequency response of the wideband signal transmission of microwave. Compared with the traditional power equalizer, microstrip equalizer can meet the demands of smaller size and high integration density, and has been widespread concerned. Many different microstrip equalizers that are compitable with the modern microelectronic process have been put forward, among them the on-line regulating equalizer comes into our eyes.This paper focused on the related research under the abundant researches about RF MEMS swith and MEMS equalizer by the research group, and finaly completed the following work:1、This paper introduced the principle, classification and study of the current situation, discussed the important application of the microwave equalizer, which indicated the significance of the research; It also gave the concept of RF MEMS swith. Then we present the model of high performance reconfigurable microwave equalizer embedded with microstrip sides which loaded with different resistances and controlled by MEMS push-and-pull swithes. Base on two pairs of four MEMS swithes, we designed decline curves and rising curves with variable maximum attenuations in the frequency range from 10GHz to 14GHz, both could achieve 10 equilibrium curves containting 4 basic equilibrium curves.2、Through the calculation of the theoretical model and the simulation of ADS, HFSS, the two groups of variable microwave equalizers were ultimately determined. The simulation results show that:the 4 basic equilibrium curves’maximum attenuations were-3dB,-4dB,-5dB,-6dB, all ten mimimum attenuations were-0.72dB (better than-1dB) and reflection coefficients were below -20dB, which meet the design goals well; the rising curves worked in the same band, which told us that the shape of the equilibrium curve could be reconfigured, the corresponding 4 basic equilibrium curves’maximum attenuations were-2.44dB,-3.36dB,-4.48dB,-5.21dB, all ten miminum attenuations were about-1.20dB(close to-1dB) and reflection coefficients were below-15dB, which meet the design goals well too; on the basis of using the same decay resistances, all related results were compared, analyzed, and also in good agreement with the theory.3、Based on the successful fabricated experience by the research group, we will choose the MetalMUMPs technology of MEMSCAP company to make our designs. So we gave the full layout designs using L-edit for test and futher research.