Research On Long Effective Active And Passive Vibration Isolation Method Of Grating Ruling Machine Based On Adaptive Control

The diffraction grating is the core part of spectrum instruments, large diffraction gratings with high precision has important application value in many high technology areas. Used to make a large area and high precision grating ruling engine itself is a kind of high precision equipment, precision machinery for the king. Grating machine not only their own complex structure, its stable operation requirements on the environment is extremely harsh, factors affecting the accuracy of the very much, the environmental vibration on the grating and stable operation of machine impact can not be ignored, the environmental vibration even very slight vibration can cause the grating ruling machine this article will focus on the characterization of precision grating machine base isolation has studied, the main contents are as follows:(1) to conduct research on the grating machine environment, full investigation of grating vibration machine and its surrounding factors may exist in the laboratory. Analyze the source and mode of transmission, the size of the frequency of vibration, and puts forward some corresponding isolation strategy, a detailed analysis of the theory of vibration grating machine generated by the laboratory personnel walk.(2) the grating machine isolation design, consider the vibration of the foundation is passed, the passive isolation has many advantages, but the air spring is good vibration isolation performance, the grating machine base to design the passive vibration isolation system and the vibration isolation system for. Low frequency vibration isolation system to overcome the defects, put forward in the ruling base isolation using active passive composite isolation method.(3) the method of grating machine base isolation using active passive composite isolation, respectively using PID control method and fuzzy PID composite vibration control of composite isolation, through simulation, using PID control method and the composite vibration isolator by disturbing fuzzy PID composite isolation method can effectively isolate low-frequency vibration the low frequency passive vibration isolation and shortcomings, and the fuzzy PID control has higher control precision than PID control method.