Study On Vibration, Conduction And Damping Of Compressionalgas Cushion Press Nanoimprint Lithography

Since the integrated circuit technology has been proposed,and resist pattern transfer as its core technology has been widely studied and applied.However,due to the resolution of optical lithography technology is restricted Rayleigh formula and the cost increased dramatically,so the international semiconductor blueprint put forward the concept of next-generation graphics transfer technology.Nanoimprint technology is a support of next-generation graphics transfer technology.Because of its technical features of high resolution,high fidelity,high yield and low cost,etc.It gets widespread attention.The thesis simply introduces the development of nano-imprint technology in recent years,and compared the advantages and disadvantages of variety traditional and emerging nano-imprint technology and the problems are encountered.Among numerous imprint technique methods the gas cushion press nanoimprint technology can well resolved the problem of applied pressure is uneven in the imprinting process.Oriented gas pressed crafts for presented compressed gas cushion press nanoimprint technology to meet application needs.But the imprinting system unavoidable produces vibration due to the piston sliding,which affects imprinting pattern transfer resolution.Firstly,in order to ensure the air-tightness of pressed chamber,the paper using polyurethane material to product the piston ring.Adopt hertz contact theory analysis of macro waviness and micro-roughness of contact surface to obtain vibration amplitude of vibration source.Further analysis of obtained the vibration transmission form on the struts and cylinder wall according to the elastic mechanical equations.To find the value of frequency and the most significant value in the oscillation superimposed,obtained the vibration delivered equations on the bottom of the pressed chamber of imprinting system by theoretical analysis and verify the theoretical analysis is correct by simulation.Then in order to effectively reduce the impact of system vibration on bearing table,and chosen the silicone as material of damping device.According to the material mechanics,analysis of vibration cause and isolation principle and establish the strong column and weak beam type vibration damping structure model.According to the simulation software COMSOL obtained the optimal values of the parameters,and establishment of a two-layer offset strong column and weak beam optimal damping structure,and the maximum attenuation of the amplitude of the vibrations.Finally,based on the group design and development of the second-generation compressional gas cushion press nanoimprint lithography machine to analyzes the vibration of cylinder wall and struts produced during movement of the piston.Verify that the theoretical correctness of maximum amplitude essentially unchanged when vibration transmission on the cylinder wall and struts.On this basis,study the effects of the speed of piston sliding and the amount of compression piston for the vibration amplitude.It provides the basis for the next experimental study.