Filter Design Based On MEMS Technology

With the rapid development of the communications industry, the integration and miniaturization of microwave components in microwave communication systems become an important trend. Filter is an essential microwave passive device in the communication system, it’s performance affects the performance of communication link directly. Tiny chips are the main active devices in communication system, the volme and weight of passive devices decide the system’s. For these reasons, developing the miniaturized high-performance microwave filter quickly and efficiently is the mainstream research direction.This paper studies the MEMS(Micro-Electro-Mechanical System, MEMS) filter design and the related MEMS micromachining process. Ultimately realize silicon cavity filter with no activity structure inside. The MEMS filter contrasts with cavity filter which has the same structure, the MEMS’s volume is 1/200 as much as the cavity’s.The main contents as follows:1, Research micro-machining technology, focusing on ICP(Inductively Coupled Plasma) etching and surface lithography of the silicon processing, micromachining composite bonding process using the above key process to achieve closure structure silicon single and double chamber filter;2, Determine the structure of the filter circuit according to the resonator coupling theory, filter network synthesis theory. Select the appropriate topology to make a filter with stable performance and compact structure. Use HFSS software to build physical model, and then simulate and optimize. To realize particular C-band and Ka-band MEMS band-pass filter;3, Fabricate the designed filters, test their performance, and contrast them with the simulation performance;4, Analyze and summarize problems of the MEMS processing and propose amendments to the program design and process to improve filter performance.