Low Temperature Coefficient Of Optical Mems Pressure Sensor Design And Manufacture

The sensor technology is the important sign of the modern scientific and technical development level, and with the communication, computer technology form three major pillars of the modern information industry. In various sensors, the pressure sensor employs the most extensive one. Considering the current use of silicon pressure sensor is mainly diffusion silicon pressure sensor, though its technology has already matured at present, it can not use in the electromagnetic interference and fiammability environment. The optical fiber MEMS pressure sensor we designed has the advantages of both the fiber sensor which has the properties of large bandwidth, high sensitivity, large range of dynamic tests and has a configuration that can be readily incorporated into sensor arrays and MEMS sensor which has the characteristics of multifunction, high sensitivity and batch production. It may solve the problems of surviving in harsh environments such as electromagnetic interference and fiammability and may have a good prospect in petrochemical industry and aviation.The principle of the optical fiber MEMS sensor, which is based on Fabry-Perot interference, is discussed. The optic and mechanics model of the sensor is established. The achievements and the deficiencies of the lab about the pressure sensor are analyzed. The temperature effect of the optical MEMS pressure sensor is emphasized and discussed. The pressure sensor with the low temperature coefficient is designed and fabricated. The experiment proves the new structure makes the optic fibre MEMS pressure sensor to reduce the temperature influence, has a better repeatability, and also inherited the high precision and high sensitivity of the original sensor.The basic theory of fabrication process is researched, such as photolithography, Reaction Ionic Etch (RIE) and anode bonding, which are needed in the fabrication. The fabrication flow is studied carefully and the steps of the process are described in detail. The packaging configuration is designed and part samples of the sensor are showed at last. The demodulation system of the sensor is set up. First, we discuss the basic performance from theory, and then we give emphasis on static characteristic containing repeatability, hysteresis, linearity, sensitivity and temperature drift. The test result indicates that the sensor has a good performance and has substantially increased in the repeatability and temperature drift than original sensor.