Research On The Temperature Errors Of Silicon Micromechanical Gyroscope

Due to the advantages of low cost,easy to integrating,high reliability and so on,the silicon micromechanical gyroscope(SMG) has been fastly developed and broadly used.Nowadays,the big errors coursed by temperature is one of the main factors which restrict the further developed of SMG.Aim to improve the temperature performance of SMG,this thesis studys on the mechanism of the temperature errors,mainly analysises the two main ways that coursed temperature errors——the changes of the mode parameters of SMG and the changes of the circuits’ features,and gets the temperature errors coursed by these two ways,points out that the changes of SMG’s mode parameters is the main factor that coursed the temperature errors.The main contents of this thesis are as follow :1.Analysis and conclude the present state of the researches on the SMG and its temperature errors,introduce the fundamental operation and control methods of SMG.2.Analysis the influence of the changes of the mode parameters to the performance of SMG,and conclude that the temperature leads to the change of the mode parameters,and the changes of the mode parameters will lead to the change of the gain and the phase of the detect mode,then the output of the gyroscope will change. According to the simulation parameters in this thesis,the bias of the gyroscope will change about-923.06 /h with the changes of the mode parameters in the whole range temperature(-40℃~60℃).3. Analysis the influence of the mode parameters to the temperature sensitivity,and obtain the conclusions through simulations:,in order to reduce the temperature errors of SMG,the designers should consider increase the detect factor,decrease the mode frequency and increase the differ of drive mode and detect mode frequency when designing the mode parameters.4. Analysis the influence of the changes of the circuit features to the performance of SMG,and obtain the conclusions :the change of the high-pass filter features will lead to the change of the gain of detect mode,then influence the scale factor of the gyroscope; the change of the detect low-pass filter features will change the scale factor and bias bothly;the phase error of the drive low-pass filter coursed by temperature will coupling to the detect mode,and if the two low-pass filters have the same features, the phase error coursed by the low-pass filter will be counteracted,and finally the influences of the feature changes of the low-pass filter will also be counteracted.5.With the Matlab/Simulink toolbox,the thesis builds the simulation models of the SMG system,and simulates the temperature errors,and gets that :in the whole range temperature,the bias error coursed by the changes of the mode parameters is about-923.06 /h,and the bias error coursed by the changes of the circuit features is about 0.0636 /h.According to the simulation results,the finally conclusion can be made :the changes of the mode parameters coursed by temperature are the main factor that course the temperature errors.