A Study On Key Technology For Slide Film Damping Of Resonant Micromechanical Gyroscope

Damping exists in the whole process of the design,manufacture and packaging of a gyroscope,plays an important part in its dynamic characteristics such as sensitivity,resolution and so on, and directly determine its quanlity factor. But in the actual engineering, due to lack of enough research on micromechanical gyros’ damping, it exists a problem that there is a big difference between its theory design performance and the actual one for a long time, which severely limits its performances’ promotion. Therefore, it is a technical problem needed to be resolved urgently in engineering design how to accurately apply damping models to calculate the gyroscope’s damping.In this paper, taking the Y-axis resonant micromechanical gyroscope as the research object, the methodes of damping model optimization are mainly researched.Firstly, the damping sources of resonant micromechanical gyros are researched in theory, which mainly come from air damping causd by movable structures, thermoelastic damping and support dissipation damping generated by the resonant beams. Aimming to the study of thermoelastic damping and support dissipation damping generated by the resonant beams are more, at present, some models provided of high precision which are verified by the experiment. Aimming to common squeeze film damping models of perforated plates also have been proposed. But there is no relevant research on slide film damping of perforated plates, so this paper analyzes the gas flow characteristics when a perforated plate moves in-plane relative to the basement and establishes perforated plate slide film damping applied model. Secondly, the accuracy of the theoretical model proposed is verifed by an experiment, and the result shows that their error between the theoretical value and the experimental one is about 6%.Thirdly, applying the damping model to calculating damping theory value of a horizontal vibration micro resonator and comparing its theoretical quality factor value and tested one, the comparison results show that the error of its theoretical one and its tested one is about 7%. the accuracy of the theoretical model proposed is verified by a third party.