| Quantum cascade laser(QCL) has the characteristics of high power, low threshold and wide working band, so the application value has been paid more attention. QCL not only can be used as light source of laser imaging radar, also can be used in many fields of chemical sensing, photoelectric countermeasure, atmospheric pollution monitoring, medical treatment without injury and active THz imaging technology etc.The cascade design of QCL enables devices to release a lot of heat, so this restricts the development of commercial QCL. Firstly, this paper introduced the basic structure, device parameters and corresponding theoretical knowledge of InGaAs/InAlAs QCL, and analysed heat source of the device, the mode of heat transfer and the calculation method; Secondly, this paper introduced the process of preparing InGaAs/InAlAs QCL, and studied the main technologies, including photolithography, wet etching, ohmic contact and packaging technology. The paper systematically analyzed the difficulties and key points of operation; Thirdly, this paper used the finite element analysis software ANSYS12.0 to simulate the distribution of temperature field in different packaging materials. The final results showed that the InGaAs/InAlAs QCL using In solder packaged device had the best thermal characteristics.Finally, the InGaAs/InAlAs QCL was successfully prepared by In solder, and we tested the output power and the emission spectrum of the device. The results showed that the light power of QCL was 18 mW, and the lasing wavelength was 10.5μm. |
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