Research Of The Optical Sensor Based On SOI

Optical sensors based on SOI(Silicon-on-Isolator) show wide application prospects in drug analysis, food safety testing, environment monitoring and other fields for its special advantages of dispensation with fluorescent tagging, high response speed,significant measure ability towards analytes, easy realization of distributed sensing,great sensitivity, low cost in integration, good stability, high selectivity, strong electromagnetic immunity, compact structure and integration, etc. With more and more researchers participating in the study and design of optical sensors, the theory of designing optical sensors is gradually improved, as well as the corresponding measuring system. In this thesis, we present several high performance optical sensors and analyze their characteristics by using finite-difference time-domain method(FDTD). Our research can be divided into three parts:In the first part, a preliminary analysis of the optical sensors, basic working principles and the properties of the material that commonly used in sensors are presented. we also summarize the applications and research situation at home and abroad of optical sensors based on a review of related literatures.In the second part, we make theoretical derivation and further analysis of optical sensors. Transfer Matrix Method(TMM) has been adopted to analyze micro-ring sensor and grating FP cavity sensor. FDTD is deduceed in detail.The initial conditions,boundary conditions and the excitation source, which are seted in the sensor of numerical simulation design are analyzed in detail in the method of FDTD.In the third part, we design seven kinds of high performance optical sensors based on SOI, four of which are micro-ring sensor and the others are grating FP cavity sensor.Structure optimization of the sensors is carried out using FDTD and their sensing properties towards NaCl solution and organic solutions are also realized. Simulation and test results indicate that these seven sensors have good sensing performance. At last, we successfully design and prove a chip of sensor array based on SOI with wide dynamic range and great sensitivity.